APA
Campbell S. A., . (1996). Science and engineering of microelectronic fabrication. Oxford University Press, New York: .
Chicago
Campbell Stephen A, . 1996. Science and engineering of microelectronic fabrication. Oxford University Press, New York: .
Harvard
Campbell S. A., . (1996). Science and engineering of microelectronic fabrication. Oxford University Press, New York: .
MLA
Campbell Stephen A, . Science and engineering of microelectronic fabrication. Oxford University Press, New York: . 1996.