Chang, C Y (ed) & Sze, S M (ed) <br/><br/>
ULSI technology 

 - The McGraw-Hill Companies, Inc., New York  1996 
 - xxvi,726 
<br/><br/><label>ISBN: </label>0-07-063062-3 
<br/><br/><label>Dewey Class. No.: </label>621.395 Cha