000 00301nam a2200121Ia 4500
100 _aChang, C Y (ed) & Sze, S M (ed)
020 _a0-07-063062-3
942 _cBK
245 _aULSI technology
260 _aThe McGraw-Hill Companies, Inc., New York
_c1996
082 _a621.395 Cha
300 _axxvi,726
999 _c27216
_d27216