| 000 | 00355nam a2200157Ia 4500 | ||
|---|---|---|---|
| 082 | _a621.381/Ada | ||
| 100 | _aAdams, Thomas; Layton, Richard A | ||
| 526 | _dTB | ||
| 526 | _aPG | ||
| 366 | _f20 | ||
| 942 | _cBK | ||
| 245 | _aIntroductory MEMS: Fabrication & applications | ||
| 260 |
_aNew York _bSpringer _c2010 |
||
| 300 | _axiii,444 | ||
| 546 | _aE | ||
| 999 |
_c77629 _d77629 |
||