000			00341nam a2200157Ia 4500
082			_a621.381/Lys
100			_aLyshevski, Sergey Edward
526			_dNTB
526			_aPG
366			_f20
942			_cBK
245			_aMems and Nems systems, devices and structures
260			_aLondon _bCRC Press _c2013
300			_a461
546			_aE
999			_c78343 _d78343